anx_III__table__71

X.A.VIII.009 | Equipment for Ultra-High-Vacuum (UHV) as follows: a. UHV pumps (sublimation, turbomolecular, diffusion, cryogenic, ion getter); b. UHV pressure gauges. Note: UHV means 100 nanoPascals (nPa) or lower.

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Source: EUR-Lex (Cellar) · retrieved 2026-10-15 · Text as adopted (Official Journal); later amendments are not incorporated in this text.